Name: Gas Analyzer – Transpector CPX – 200 AMU
Availability: InStock

Aftercoolers

Gas Analyzers

Hydrogen Blowers

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Power Management Modules

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Hydrogen Dryers

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Solid Oxide Electrolytes

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Cathode Filters Gas Filters Hydrogen Filters Ion Exchange Filters Silencers

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Membrane Electrode Assembly

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Tube Connections Tubes Valve Manifold

Air Actuated Valves Angle Seat Valves Ball Valves Cathode Isolation Valves Check Valves Coaxial Valves Control Valves Cryogenic Valves Flow Control Valves Gate Valves Globe Valves Hydrogen Back Pressure Regulators Hydrogen Fuel Cell Pressure Regulators Hydrogen Pressure Reducing Valves Hydrogen Pressure Relief Valves Hydrogen Pressure Solenoid Valves Hydrogen Tank Valves Needle Valves On Tank Valves Piston Valves Plunger Valves Process Automation Solenoid Valves Proportional Valves Safety Valves Shut-Off Valves

Vents Water Tanks

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Fuel Cell Exhaust Air Systems Fuel Cell Systems

Diaphragm Compressors Hydrogen Piston Compressors Hydrogen Screw Compressors

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Use Cases

300 mm Wafer Degas

Advanced Processes including Atomic Layer Deposition (ALD)

Etch Processes including metal, dielectric, silicon etch, and high-density plasma etch

Chemical Vapor Deposition (CVD) Processes including high-k dielectrics, HDP-CVD, LP-CVD, SA-CVD, CVD low-k, PE-CVD

Diffusion and Epitaxy Processes

Ion Implantation

Advanced process control (endpoint detection)

Run-by-run and real-time fault detection and classification

Statistical process control (SPC)

Maintenance and decision support with FabRecover

Typically used in hydrogen and related industrial applications

Capabilities

Industry-leading measurement speed and sensitivity

Detects undesirable variance in atomic layer processes

Fastest RGA process monitor available

Maximum uptime with innovative inlet and ion source feature options

Smaller Fab Footprint (30% reduction in system volume)

Optional Dual Filament Ion Source for extended lifetime

Configurable HexBlock with up to three pressure inlets

Corrosion Resistant Capacitance Diaphragm Gauge (CDG)

Automated Calibration for long-term data stability and accuracy

Process Integration with FabGuard® software and INFICON experts

Fast data collection speed up to 1.8 milliseconds per data point

Field-proven HexBlock inlet system adaptable to up to three process pressures

Corrosion resistant process pressure gauge for long life

Low-noise, high-gain continuous dynode electron multiplier

High-performance pumping platform with fast pumping and reduced footprint

Gas Analyzer – Transpector CPX – 200 AMU

Use Cases

Capabilities

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