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Hydrogen Filters

Hydrogen Filter – 20-60 HX Series

Entegris, Inc.

  • Efficient bulk gas removal of H2O, O2, CO, CO2, THC, and N2 impurities
  • Sub-ppb performance in compact footprints
  • Ultra-high purity hydrogen gas for semiconductor applications
  • Continuous purification with two adsorber vessels alternating between purify and regeneration modes
  • Automated microprocessor controller

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Description Vendor

The GateKeeper Gas Purification System, 20-60 HX Series, is an advanced continuous service gas purification system designed for semiconductor manufacturers. It provides purified hydrogen, nitrogen, or argon gas at a low cost of ownership and is suitable for critical applications such as semiconductor and LED production. The system features an ultra-small footprint and compact design, requiring minimal fab floor space and allowing easy access to serviceable components. It uses ambient temperature purification, eliminating the need for heating and reducing energy costs. The system effectively removes contaminants like moisture, oxygen, carbon monoxide, carbon dioxide, and non-methane hydrocarbons from nitrogen, hydrogen, and argon gas, achieving outlet purity in parts-per-trillion (ppt) levels. It is CE, CSEI (China), and SEMI certified, with an Ethernet connection for remote monitoring and easy field maintenance and upgrades. The system is available in various models (GPS20HX, GPS30HX, GPS50HX, GPS60HX) with different flow rates and specifications, and it includes safety features like an EMO button, remote EMO activation, and visual and audible alarms.

Use Cases

  • Semiconductor
  • Data storage
  • Flat panel display
  • LED
  • Solar
  • Typically used in hydrogen and related industrial applications

Capabilities

  • Provide ultra-high purity hydrogen gas for semiconductor applications
  • Provide continuous purification in a single process
  • Provides sub-ppb performance in small footprints with flow rates up to 16,667 slpm (1,000 Nm³/hr)
Entegris, Inc. Entegris, Inc. (NASDAQ: ENTG), headquartered in Billerica, Massachusetts with approximately 8,000 employees worldwide and over 50 years of experience, provides advanced materials science solutions including a comprehensive suite of hydrogen gas purification systems developed for semiconductor, flat panel display, and hydrogen energy applications. The company's MegaTorr PS7 series hydrogen gas purifiers use adsorption processes (auto-regenerable, cryogenic, and adsorber/getter configurations) to efficiently remove impurities including H2O, O2, CO, CO2, THC, and N2 at flow rates up to 16,667 slpm (1,000 Nm³/hr), providing ultra-high-purity hydrogen for demanding industrial applications. Entegris's GateKeeper HX Series gas purification systems deliver continuous-flow, point-of-use purified hydrogen, nitrogen, or argon gas at low cost of ownership, with in-situ regeneration capability that maintains gas consistency, lifetime, and outlet purity across critical manufacturing processes. As a member of the US Hydrogen Alliance, Entegris applies decades of microcontamination control expertise from semiconductor manufacturing to the hydrogen energy sector's growing need for reliable, high-performance gas purification infrastructure.
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