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Hydrogen Filters

Hydrogen Filter – Heated Getter Purifiers

Entegris, Inc.

  • Removes nitrogen and methane impurities from gases like argon, helium, xenon, nitrogen, and hydrogen
  • Uses heated getter technology for superior impurity removal to sub-ppb levels
  • Ideal for point-of-use purification in various industrial applications
  • Applications include vapor deposition, photolithography, metrology, R&D, LED, crystal pulling, implant, etching, diffusion, oxidation, annealing, fiber optics, analytical, solar, and photovoltaics
  • Includes features like high temperature alarm, life status sensor, bypass assembly, and optional features like N2 purge system and hydrogen leak detector

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Description Vendor

GateKeeper HGU Heated Getter Purifiers are advanced solutions for point-of-use purification, specifically designed to remove nitrogen (N₂) and methane (CH₄) impurities from gases such as argon (Ar), helium (He), xenon (Xe), nitrogen (N₂), and hydrogen (H₂). These purifiers utilize heated getter technology, which forms an irreversible bond with impurities, effectively removing them to sub-ppb levels. This technology surpasses ambient purification methods by utilizing the entire volume of material, resulting in superior impurity capacity and extended purifier life. The units are versatile and suitable for a wide range of applications, including vapor deposition processes (MOCVD, PVD, CVD, epitaxy), photolithography, metrology, R&D laboratory experiments, LED manufacturing, crystal pulling, implantation, etching, diffusion and oxidation processes, annealing, fiber optics, analytical work, solar and photovoltaics. The purifiers come in various models, such as PS2-GC50, PS3-MT3, PS4-MT3, PS4-MT15, and PS4-MT50, each tailored for different flow rates and application requirements.

Use Cases

  • Vapor deposition processes
  • Photolithography
  • Metrology
  • R&D laboratory experiments
  • LED
  • Crystal pulling
  • Implant
  • Etching
  • Diffusion and oxidation processes
  • Annealing
  • Fiber optics
  • Analytical
  • Solar and photovoltaics
  • Typically used in hydrogen and related industrial applications

Capabilities

  • Removes nitrogen and methane impurities
  • Purifies argon, helium, xenon, nitrogen, and hydrogen
  • Utilizes heated getter technology for superior impurity removal
  • Operates with sub-ppb impurity levels
  • Offers various flow rate capabilities across different models
  • Includes safety features like emergency stop buttons and bypass assemblies
  • Supports multiple gas purification applications
Entegris, Inc. Entegris, Inc. (NASDAQ: ENTG), headquartered in Billerica, Massachusetts with approximately 8,000 employees worldwide and over 50 years of experience, provides advanced materials science solutions including a comprehensive suite of hydrogen gas purification systems developed for semiconductor, flat panel display, and hydrogen energy applications. The company's MegaTorr PS7 series hydrogen gas purifiers use adsorption processes (auto-regenerable, cryogenic, and adsorber/getter configurations) to efficiently remove impurities including H2O, O2, CO, CO2, THC, and N2 at flow rates up to 16,667 slpm (1,000 Nm³/hr), providing ultra-high-purity hydrogen for demanding industrial applications. Entegris's GateKeeper HX Series gas purification systems deliver continuous-flow, point-of-use purified hydrogen, nitrogen, or argon gas at low cost of ownership, with in-situ regeneration capability that maintains gas consistency, lifetime, and outlet purity across critical manufacturing processes. As a member of the US Hydrogen Alliance, Entegris applies decades of microcontamination control expertise from semiconductor manufacturing to the hydrogen energy sector's growing need for reliable, high-performance gas purification infrastructure.
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