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Hydrogen Filters

Hydrogen Filter – MegaTorr PS7-A

Entegris, Inc.

  • Efficient bulk gas removal of H2O, O2, CO, CO2, and NMHC impurities
  • Ultra-high purity hydrogen gas for semiconductor applications
  • Auto regenerable design
  • Two adsorber vessels alternate between purify and regeneration modes
  • Automated microprocessor controller
  • H2 leak detection sensor
  • Ultrafine 0.003 µm particle filter

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Description Vendor

The MegaTorr PS7-A Hydrogen Gas Purifiers are advanced, auto-regenerable systems designed for efficient bulk gas removal of impurities such as H2O, O2, CO, CO2, and NMHC. These purifiers provide sub-ppb performance in compact footprints, making them ideal for applications requiring ultra-high purity (UHP) hydrogen gas. They utilize adsorption processes with two alternating adsorber vessels to ensure continuous purification. The system is optimized for flow rates up to 16,667 slpm and is engineered with integrated control systems, advanced process material analysis, and high reliability. The purifiers are suitable for semiconductor manufacturing, data storage, flat panel displays, LEDs, and solar industries, offering low capital cost and high performance.

Use Cases

  • Semiconductor
  • Data storage
  • Flat panel display
  • LED
  • Solar
  • Typically used in hydrogen and related industrial applications

Capabilities

  • Provide ultra-high purity hydrogen gas for semiconductor applications
  • Provide continuous purification in a single process
  • Provides sub-ppb performance in small footprints with flow rates up to 16,667 slpm (1,000 Nm³/hr)
  • Ultrafine 0.003 µm particle filter
Entegris, Inc. Entegris, Inc. (NASDAQ: ENTG), headquartered in Billerica, Massachusetts with approximately 8,000 employees worldwide and over 50 years of experience, provides advanced materials science solutions including a comprehensive suite of hydrogen gas purification systems developed for semiconductor, flat panel display, and hydrogen energy applications. The company's MegaTorr PS7 series hydrogen gas purifiers use adsorption processes (auto-regenerable, cryogenic, and adsorber/getter configurations) to efficiently remove impurities including H2O, O2, CO, CO2, THC, and N2 at flow rates up to 16,667 slpm (1,000 Nm³/hr), providing ultra-high-purity hydrogen for demanding industrial applications. Entegris's GateKeeper HX Series gas purification systems deliver continuous-flow, point-of-use purified hydrogen, nitrogen, or argon gas at low cost of ownership, with in-situ regeneration capability that maintains gas consistency, lifetime, and outlet purity across critical manufacturing processes. As a member of the US Hydrogen Alliance, Entegris applies decades of microcontamination control expertise from semiconductor manufacturing to the hydrogen energy sector's growing need for reliable, high-performance gas purification infrastructure.
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