Mobile Helium Leak Detector – UL3000

INFICON

High-speed leak detection
Intelligent background suppression for improved measurement accuracy
Applicable for vacuum and sniffer leak detection
User-friendly HMI with full-color high-resolution rotatable display
Remote control via mobile device using Wi-Fi

The UL3000 Fab (ULTRA) Mobile Helium Leak Detector is a cutting-edge device designed specifically for semiconductor manufacturing environments. It combines advanced ULTRATEST sensor technology with a robust design to deliver high-speed, accurate leak detection. The device is equipped with HYDRO-S software, which eliminates water vapor background, enabling quicker and more sensitive measurements. It features a high-resolution touch display, intuitive user interface, and remote control capabilities via Wi-Fi. The device is compact, easy to maneuver, and includes a robust ion source with a 3-year warranty, ensuring low total cost of ownership. It is ideal for detecting leaks in vacuum systems, gas delivery lines, and various process tools in semiconductor fabrication facilities.

Use Cases

Leak checking of semiconductor and display tools, including subcomponents
Vacuum lines and pumps in sub fab
Gas cabinets and complex gas delivery lines
Fab facilities and abatement
Quick confirmation of tool integrity and pinpoint leaks to be fixed after tool maintenance
Typically used in hydrogen and related industrial applications

Capabilities

Save Time with I-CAL software algorithm for fast measurements in the range of 10^-8 to 10^-12 mbar l/s
Most efficient leak checking using I-ZERO 2.0 with improved intelligent function for fast background suppression while maintaining high measurement sensitivity
Applicable for vacuum and sniffer leak search
Minimize leak checking efforts through quick evacuation and response time
Time saved by easy maneuverability through slim design
Low total cost of ownership (TCO) enabled by robust ion source (3 year warranty) and counterflow vacuum system
Easy to use, operator-guided HMI with full color high resolution rotatable display
Start leak checking earlier as HYDRO-S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
Faster pump down (evacuation) times due to higher air pumping speed
Lower TCO due to maintenance free roots roughing pump
Intuitive user guidance with touch display
Modern menu structure
Rotatable full color high resolution display
Remote control by mobile device via Wi-Fi
Data storage capability
Data export using USB stick (access controlled)
Robust vacuum system
Ruggedized ion source with 3-year warranty
Small and ruggedized design for stability and optimal mobility
Easy handling with low center of gravity
Big wheels easily overcome obstacles
180° mass spectrometer
All components made of stainless steel
Pre-amplifier with highest sensitivity in industry

INFICON INFICON, a global supplier of leak detection and gas analysis solutions with decades of expertise identifying hydrogen gas at the lowest concentrations, provides advanced leak detection technology enabling both quality assurance of hydrogen production systems and components as well as real-time hydrogen detection of even the smallest leaks, minimizing accident risk and ensuring production system integrity. The company's Sensistor Sentrac Hydrogen Leak Detector locates and quantifies a wide range of leaks faster and more accurately than soap spray or helium leak detection methods, serving critical applications across hydrogen electrolyzer stacks (where numerous cells with membranes, electrodes, and seals must be monitored to prevent dangerous leaks), compressed hydrogen storage (regularly inspecting compressor housings, seals, and pistons), and piping/gas manifolds where hydrogen's tiny molecular size can escape through the smallest holes in fittings, joints, and valves. INFICON's Strix hand probe, introduced for automotive applications including engine assemblies, air-conditioning systems, battery cases, brake lines, and fuel systems, is 30% lighter and 12.5% smaller-tipped than previous handheld probes, using complex algorithms to shorten measurement times, improve accuracy, and speed recovery times when connected to the Sentrac Hydrogen Leak Detector with a non-flammable hydrogen-nitrogen tracer gas mixture. As hydrogen production and applications continue expanding globally, INFICON's comprehensive leak detection portfolio -- spanning production, transportation, and storage pathways -- supports the safe deployment of hydrogen infrastructure by identifying potential leak points before they develop into major hazards or resource losses.

First name

Last name

Company

Country

Quantity

Business e-mail

Message to vendor

I consent to the privacy policy and terms of use.*

This site is protected by reCAPTCHA and the Google privacy policy and terms of service apply.

Latest products

Coating Equipment Magnetron Sputtering Equipment for Noble Metal Coatings By AGC Plasma Technology Solutions

Pressure Sensors JUMO TAROS H48 Ex By JUMO GmbH & Co. KG

Electrolyser Cells quickCONNECTfixture qCf FC25/125 V1.0 LC 8 bar for AEM / PEM Electrolysis By balticFuelCells GmbH

Hydrogen Component Test Equipment Hydrogen Component Test Equipment - MBR By Hiden Isochema Ltd

Fuel Cell Stack Testing PEM Fuel Cell Short and Full Stack Testing- up to 330 kW By Zentrum für Sonnenenergie- und Wasserstoff-Forschung Baden-Württemberg (ZSW)

Electrolyser Stack Testing PEM Electrolyzer Short and Full Stack Testing - up to 150 kW By Zentrum für Sonnenenergie- und Wasserstoff-Forschung Baden-Württemberg (ZSW)

Hydrogen Component Test Equipment Hydrogen Component Test Equipment - XEMIS-001 By Hiden Isochema Ltd

Hydrogen Component Test Equipment Hydrogen Component Test Equipment - XEMIS-003 By Hiden Isochema Ltd

Hydrogen Component Test Equipment Hydrogen Component Test Equipment - IGA-001 By Hiden Isochema Ltd

Hydrogen Component Test Equipment Hydrogen Component Test Equipment - IGA-003 By Hiden Isochema Ltd

Hydrogen Component Test Equipment Hydrogen Component Test Equipment - IMI-HTP By Hiden Isochema Ltd

Hydrogen Storage Systems Hydrogen Storage System - FTXT By FTXT Energy Technology Co., Ltd.