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Gas Analyzers

Gas Analyzer – 200 AMU

INFICON

  • Comprehensive Intelligent Manufacturing Systems solutions for electronics manufacturing
  • Increase capital productivity, labor efficiency, and overall factory efficiency
  • Real-time process monitoring and data analysis
  • Predictive applications for factory performance optimization
  • Smart FDC

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Description Vendor

The Transpector APX Residual Gas Analyzer is an advanced process monitor designed for semiconductor and display manufacturing, offering industry-leading measurement speed and sensitivity. It is ideal for monitoring complex processes such as ALD, CVD, and etch, helping to minimize scrap and maximize yield in real-time. With features like automated calibration, EUV fab readiness, and a compact footprint, it provides precise trace gas analysis and supports advanced process control and diagnostics through integration with FabGuard software. The analyzer is equipped with innovative inlet and ion source options, allowing it to adapt to various process conditions and chemistries. It delivers fast data collection with industry-leading electronics, enabling data collection speed up to 1.8 milliseconds per data point (approximately 555 data points per second). The Transpector® APX is also designed for maximum uptime with robust, field replaceable components and proprietary coatings for chemical resistance, making it suitable for highly aggressive processes. Its advanced capabilities make it the market-leading Residual Gas Analyzer (RGA) for semiconductor and display process monitoring.

Use Cases

  • Monitoring advanced processes such as ALD and HDP CVD
  • Minimizing scrap and maximizing yield in real time for semiconductor processes
  • Detecting hydrocarbon contamination in EUV fabs
  • Process integration with FabGuard® software for diagnostics and monitoring
  • Continuous monitoring for critical process steps in ALD, CVD, and Etch processes
  • Endpoint detection for ALD and CVD processes
  • Monitoring 300 mm wafer degas
  • Ion implantation processes
  • Detecting contaminants in semiconductor and display manufacturing
  • Typically used in hydrogen and related industrial applications

Capabilities

  • Real-time process monitoring
  • High-speed data collection (up to 555 data points per second)
  • Precise control over precursor chemical doses
  • Low detection limits for trace gases
  • Robust and field replaceable ion sources
  • Inlet systems designed for aggressive process chemistries
  • Automated calibration for long-term data stability
  • Compatibility with EUV fabrication processes
  • Integration with FabGuard® software for advanced process control
INFICON INFICON, a global supplier of leak detection and gas analysis solutions with decades of expertise identifying hydrogen gas at the lowest concentrations, provides advanced leak detection technology enabling both quality assurance of hydrogen production systems and components as well as real-time hydrogen detection of even the smallest leaks, minimizing accident risk and ensuring production system integrity. The company's Sensistor Sentrac Hydrogen Leak Detector locates and quantifies a wide range of leaks faster and more accurately than soap spray or helium leak detection methods, serving critical applications across hydrogen electrolyzer stacks (where numerous cells with membranes, electrodes, and seals must be monitored to prevent dangerous leaks), compressed hydrogen storage (regularly inspecting compressor housings, seals, and pistons), and piping/gas manifolds where hydrogen's tiny molecular size can escape through the smallest holes in fittings, joints, and valves. INFICON's Strix hand probe, introduced for automotive applications including engine assemblies, air-conditioning systems, battery cases, brake lines, and fuel systems, is 30% lighter and 12.5% smaller-tipped than previous handheld probes, using complex algorithms to shorten measurement times, improve accuracy, and speed recovery times when connected to the Sentrac Hydrogen Leak Detector with a non-flammable hydrogen-nitrogen tracer gas mixture. As hydrogen production and applications continue expanding globally, INFICON's comprehensive leak detection portfolio -- spanning production, transportation, and storage pathways -- supports the safe deployment of hydrogen infrastructure by identifying potential leak points before they develop into major hazards or resource losses.
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