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Gas Analyzers

Gas Analyzer – Transpector APX-100 AMU

INFICON

  • Comprehensive Intelligent Manufacturing Systems solutions for electronics manufacturing
  • Real-time process monitoring and data analysis
  • Predictive applications for optimizing factory performance
  • Smart FDC
  • High sensitivity and fast data collection

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Description Vendor

The Transpector APX Residual Gas Analyzer is an advanced process monitor designed for semiconductor and display manufacturing processes such as Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), and etch. It offers industry-leading measurement speed and sensitivity, enabling real-time monitoring and optimization of complex processes. With features like automated calibration, EUV fab readiness, and a compact design, it minimizes scrap and maximizes yield while ensuring high uptime and precision in trace gas analysis. The analyzer is ideal for monitoring advanced processes such as ALD and HDP CVD, providing critical data for process control and diagnostics. It is equipped with innovative inlet and ion source options, proprietary coatings for chemical resistance, and integration with FabGuard software for advanced process monitoring and diagnostics.

Use Cases

  • Monitoring advanced processes such as ALD and HDP CVD
  • Minimizing scrap and maximizing yield in real time for semiconductor processes
  • Detecting hydrocarbon contamination in EUV fabs
  • Process integration with FabGuard® software for diagnostics and monitoring
  • Continuous monitoring for critical process steps in ALD, CVD, and Etch processes
  • Endpoint detection for ALD and CVD processes
  • Monitoring 300 mm wafer degas
  • Ion implantation processes
  • Detecting contaminants in semiconductor and display manufacturing
  • Typically used in hydrogen and related industrial applications

Capabilities

  • Real-time process monitoring
  • High-speed data collection (up to 555 data points per second)
  • Precise control over precursor chemical doses
  • Automated calibration for long-term data stability
  • EUV fab readiness with low hydrocarbon detection limits
  • Field replaceable ion sources and electron multiplier
  • Configurable inlet systems for various pressure ranges
  • Proprietary coatings for chemical resistance
  • Integration with FabGuard® software for advanced process control
INFICON INFICON, a global supplier of leak detection and gas analysis solutions with decades of expertise identifying hydrogen gas at the lowest concentrations, provides advanced leak detection technology enabling both quality assurance of hydrogen production systems and components as well as real-time hydrogen detection of even the smallest leaks, minimizing accident risk and ensuring production system integrity. The company's Sensistor Sentrac Hydrogen Leak Detector locates and quantifies a wide range of leaks faster and more accurately than soap spray or helium leak detection methods, serving critical applications across hydrogen electrolyzer stacks (where numerous cells with membranes, electrodes, and seals must be monitored to prevent dangerous leaks), compressed hydrogen storage (regularly inspecting compressor housings, seals, and pistons), and piping/gas manifolds where hydrogen's tiny molecular size can escape through the smallest holes in fittings, joints, and valves. INFICON's Strix hand probe, introduced for automotive applications including engine assemblies, air-conditioning systems, battery cases, brake lines, and fuel systems, is 30% lighter and 12.5% smaller-tipped than previous handheld probes, using complex algorithms to shorten measurement times, improve accuracy, and speed recovery times when connected to the Sentrac Hydrogen Leak Detector with a non-flammable hydrogen-nitrogen tracer gas mixture. As hydrogen production and applications continue expanding globally, INFICON's comprehensive leak detection portfolio -- spanning production, transportation, and storage pathways -- supports the safe deployment of hydrogen infrastructure by identifying potential leak points before they develop into major hazards or resource losses.
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